Pressure Regulators

Pressure Regulators

High purity (UHP) regulators used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

Diaphragm Valves

Diaphragm Valves

High purity (UHP) diaghram valves used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

Check Valve/Vacuum Generator/Flow Switch

Check Valve/Vacuum Generator/Flow Switch

High purity (UHP) check valves/vacuum generators/flow switches are used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.