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- XGTP, Parallel Seal Slit Valve for High Vacuum
XGTP, Parallel Seal Slit Valve for High Vacuum
Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers. The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate. Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.
- Window sized for 300mm wafers
- End lock holds gate opened or closed during emergency stop
- Insert or cassette type (standard, half MESK) valves
- FKM or Kalrez® 4079 gate seal materials
- Optional position sensor and connectors
- Various made to order options available
How to order
RoHS
Slit Valve
XGT Series
How to Order
22 2 46236 1 C
High vacuum slit valve
Valve size
Applicable wafer size
200 mm
300 mm
Number of axis
Two axes bellows
One axis bellows
Symbol
22
31
Opening window size
Height x width (mm)
32 x 222
46 x 236
50 x 336
Applicable wafer size
200 mm
300 mm
Symbol
32222
Note)
46236
50336
Auto switch
and the connector
(Refer to the table below)
Gate O-ring material
Material
FKM
Kalrez
®
4079
Symbol
1
2
XGT
Valve type
1
Non-cassette
type
Symbol
Valve type
Applicable
wafer size
200 mm
300 mm
2
Cassette type
Standard
Cassette type
Half MESK
Cassette type
Full MESK
3 4
—
Auto switch and connector
None —
Lead wire: 0.5 m (without connector)
D-A93
(With 2 pcs.
for opening
and closing)
With multiple connector
Note 1)
(T3106 000: Made by AMP)
With D-sub connector
Note 2)
(CDE-9PF05: Made by
HIROSE ELECTRIC CO., LTD.)
Symbol Auto switch Connector
Nil
A
C
F
Height
Width
For 200 mm wafer For 300 mm wafer
For 200 mm wafer For 300 mm wafer
Non-cassette type
Cassette type
Note) Neither cassette type Half MESK nor cassette
type Full MESK are set.
Note 1) T3105000 made by AMP is recommended for the connector (female type).
Note 2) CDE-9SF05 made by HIROSE ELECTRIC CO., LTD. is recommended for the con-
nector (female type).
Made to Order specifications
(For details, refer to page 534.)
529
XL
XLA
XLQ
XM
XY
D-
XVD
XSA
XGT
CYV
XGT
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