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- AZ1100, Single Stage Regulator for Delivery of Sub-atmospheric Pressure
AZ1100, Single Stage Regulator for Delivery of Sub-atmospheric Pressure
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
- For UHP gas delivery
- Sub-atmospheric to low positive pressure delivery
- Body material: 316L SS
- Hastelloy® internals available for corrosion resistance
- Flow capacity to 0.5 slpm
How to order
Porting Configuration
3PW
wq
r
2PW
wq
4PW
wq
re
¡For UHP gas delivery
¡High inlet pressure type: Max. 3500 psig (24.1 MPa)
¡Flow capacity Standard: to 30 slpm
HF (option): to 120 slpm
Series AZ1000
Bonnet option
No code
P
BP
Bonnet
Standard
Panel installation
∗
6)
Bonnet port (NPT 1/8 inch)
Code
∗6) Panel mounting hole: dia.
1.56 inch (39.6 mm).
How to Order
AZ10 S FV4 FV401 2PW
Surface finish
No code
Q
Surface finish Ra
10 µin. (0.25 µm) Standard
25 µin. (0.62 µm)
Code
Ports
2PW
3PW
4PW
Ports
2 ports
3 ports
4 ports
Code
Connections (Inletq, Outletw)
FV4
MV4
FV6
MV6
TW6
Connections
1/4 inch face seal (Female)
1/4 inch face seal (Male)
3/8 inch face seal (Female)
3/8 inch face seal (Male)
3/8 inch tube weld
Code
Seat material
No code
VS
TF
Material
PCTFE (Standard)
Vespel
®
∗
3)
PTFE
∗
4)
∗
5)
Code
∗3)
Not available with SHP material.
∗4)
PTFE recommended for applications
such as within a process tool.
∗5)
Source pressure rating is limited
to 300 psig (2.1 MPa) or less.
Port Number
qwer
Delivery pressure
01
02
06
10
15
Delivery pressure
1 to 10 psig (0.007 to 0.07 MPa)
1 to 30 psig (0.007 to 0.2 MPa)
2 to 60 psig (0.014 to 0.4 MPa)
2 to 100 psig (0.014 to 0.7 MPa)
5 to 150 psig (0.034 to 1.0 MPa)
Code
No code
0
V3
L
1
H
2
4
10
40
Pressure gauge
∗
1)
No gauge port
Code
No pressure gauge
(Connections: 1/4 inch face seal male)
Operating Parameters
Delivery pressure
Gas
Source pressure
Proof pressure (Inlet)
Burst pressure
Ambient and operating temperature
Cv
Leak rate
Across the seat leak
Surface finish
Connections
Supply pressure effect
Installation
Internal volume
Mass
AZ1001
Vacuum to 3500 psig (24.1 MPa)
∗
1)
5000 psig (34.5 MPa)
10000 psig (69 MPa)
–40 to 160°C (–40 to 71°C) (No freezing)
∗
2)
0.09
2 x 10
-11
Pa·m
3
/sec
2 x 10
-10
Pa·m
3
/sec
∗
3)
4 x 10
-9
Pa·m
3
/sec
∗
4)
Ra 10 µin. (0.25 µm) Option: 25 µin. (0.62 µm)
Face seal, Tube weld
0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Bottom mount (Option: panel mount)
0.49 in
3
(8 cm
3
)
2.76 lbs (1.25 kg)
∗
5)
AZ1002 AZ1006 AZ1015AZ1010
Specifications
Option
No code
HF
SpecificationCode
Material
S
SHP
Body
316L SS
Poppet
316L SS
Diaphragm
316L SS
Nozzle
316L SS
Hastelloy®
C-22
Hastelloy®
C-22
Code
Pressure gauge unit
∗
2)
No code
MPA
Unit
psig/bar
MPa
Code
Gauge port (Inlete, Outletr)
Select compatible materials of construction for the gas
∗2) Pressure gauge unit MPa or
psig/bar selectable. However
under Japanese regulation, only
MPa is available in Japan.
∗1) Refer to gauge guide (P.94) for gauge
specifications.
∗1) Max 300 psig (2.1MPa) for PTFE seat.
∗2) 14 to 194°F (–10 to 90°C) for Vespel
®
seat.
∗3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).
Standard (Cv: 0.09)
High flow (Cv: 0.15)
Single Stage Regulator for Ultra High Purity
Low to intermediate
flow
Inboard leakage
Outboard leakage
qIN wOUT eGauge port (Inlet) rGauge port (Outlet)
∗4) Tested with Helium gas inlet pressure 1000 psig (7 MPa).
∗5) Mass, including individual boxed weight, may vary depending on
connections or options.
Vacuum to 300 psig
(2.1 MPa)
1 to 30 psig
(0.007 to 0.2 MPa)
2 to 60 psig
(0.014 to 0.4 MPa)
5 to 150 psig
(0.034 to 1.0 MPa)
2 to 100 psig
(0.014 to 0.7 MPa)
1 to 10 psig
(0.007 to 0.07 MPa)
2PW
3PW
4PW
AZ1001S
e
1
w
FV4
FV4
FV4
q
FV4
FV4
FV4
r
V3
V3
MPA
MPA
Sample Order Number
Port
psig/bar unit
MPa unit
-30 in.Hg to 30 psig
-30 in.Hg to 60 psig
-30 in.Hg to 100 psig
-30 in.Hg to 160 psig
0 to 200 psig
0 to 400 psig
0 to 1000 psig
0 to 4000 psig
-0.1 to 0.2 MPa
-0.1 to 0.4 MPa
-0.1 to 0.7 MPa
-0.1 to 1.1 MPa
0 to 1.4 MPa
0 to 3 MPa
0 to 7 MPa
0 to 28 MPa
¡Body material: 316L SS
¡Hastelloy internals available
for corrosion resistance
32
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