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- AP1000, Single Stage Regulator, Low to Intermediate Flow w/Bonnet Port
AP1000, Single Stage Regulator for Ultra High Purity, Low to Intermediate Flow w/Bonnet Port
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- High inlet pressure type: max. 3500 psig (24.1MPa)
- Flow capacity: standard to 30 slpm; HF (option) to 120 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Point of use and source cylinder applications
How to order
2 x 10-32 UNF depth 0.25 (6.3)
(Mounting hole)
45
°
m1.12
(m28.4)
0.44 (11.2)
A
Max. 3.32 (84.3)
ø0.82
(ø20.8)
ø1.00
(ø25.4)
1.00
(25.4)
Option Other Parameters
HF
Cv
Supply pressure effect
AP501mmA
AP501 AP502 AP506
0.1
0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop
AP510
Option
High flow
Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are:
Hastelloy
®
is a registered trademark of Haynes International. Elgiloy
®
is a registered trademark of Elgiloy Specialty Metals.
Vespel
®
is a registered trademark of DuPont.
316L SS
PTFE (Option: PCTFE, Vespel
®
)
Hastelloy
®
C-22
PTFE (Option: PCTFE)
316L SS secondary remelt
Electropolish + Passivation
Elgiloy
®
316L SS
Wetted Parts
Body
Surface finish
Poppet
Diaphragm
Nozzle
Seat
SSH
Wetted Parts Material
Connections
FV4
MV4
TW4
2.78
2.12
A
(70.6)
(53.8)
inch (mm)
Dimensions
AP500
Flow Characteristics
Single Stage Compact Regulator for Ultra High Purity Series AP500
inch (mm)
0
5
10
15
20
25
30
35
0 10 20 30 40 50 60 70 80
Flow Rate (slpm, N
2)
Delivery pressure (psig)
0.00
0.03
0.07
0.10
0.14
0.17
0.21
0.24
Delivery pressure (MPa)
0
5
10
15
20
25
30
35
0246810
Flow rate (slpm, N
2)
Delivery pressure (psig)
0.00
0.03
0.07
0.10
0.14
0.17
0.21
0.24
Delivery pressure (MPa)
0
100
200
300
400
500
600
700
012345678
Flow rate (slpm, N
2)
Delivery pressure (mmHg abs)
-101
-88
-75
-61
-48
-35
-21
-8
Derivery pressure (kPa)
760 0
AP500HF
75 psig (0.52 MPa)
30 psig (0.21 MPa)
Inlet pressure: 45 psig (0.31 MPa)
AP500
100 psig (0.69 MPa)
Inlet pressure:
30 psig (0.21 MPa)
AP501A
Input pressure : 2 psig (14 kPa)
3
AZAKKTBP
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Technical Data/
Glossary of Terms
Precautions SL AP
Recommendations
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