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- AP3571 & 4571, Diaphragm Valve, Air Operated, Two Step
AP3571 & 4571, Diaphragm Valve, Air Operated, Two Step
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt.
- Two step mode - metered flow and full open
- Two separate actuation ports
- Soft start valve to minimize vacuum chamber pressurization turbulence
- Metered flow adjustable
- Pneumatically actuated normally closed
- Body material: 316L SS secondary remelt
How to order
¡Suitable for UHP gas supply line
¡Body material : 316L SS secondary remelt
¡Pneumatically actuated normally closed or normally open
¡LOTO option available as an option (AP3540)
¡Indicator switch available as an option (AP3550)
Series AP3500
How to Order
AP
3
S FV4 FV4540 2PW
Face to face dimension
∗
1)
No code
1.75
Dimension
2.12 inch (53.8 mm) Standard
1.75 inch (44.5 mm)
Code
Size
3
Cv
0.29
Code
Material
S
H
Body material
316L SS secondary remelt
Hastelloy
®
C-22
Code
Surface finish
No code
M
V
X
Surface finish Ra max
15 µin. (0.4 µm) Standard
10 µin. (0.25 µm)
7 µin. (0.18 µm)
5 µin. (0.13 µm)
Code
Ports
2PW
Ports
2 ports
Code
Connections (Inlet, Outlet)
FV4
MV4
TW4
FV6
MV6
TW6
Connections
1/4 inch face seal (Female)
1/4 inch face seal (Male)
1/4 inch tube weld
3/8 inch face seal (Female)
3/8 inch face seal (Male)
3/8 inch tube weld
Code
Seat material
No code
VS
Material
PCTFE (Standard)
Vespel
®
∗
2)
Code
Option (AP3550 only)
No code
ISC
ISO
Specification
—
N.C. Indicator switch
∗
3)
N.O. Indicator switch
∗
4)
Code
Operating Parameters
Status
Gas
Operating pressure
Proof pressure
Burst pressure
Ambient and operating temperature
Cv
Leak rate
Across the seat leak
Surface finish
Connections
Actuation pressure
Actuation port connection
Actuation port location
Installation
Internal volume
Mass
LOTO (Lockout)
AP3540
Normally closed (N.C.)
Select compatible materials of construction for the gas
AP3550 AP3580
Normally open (N.O.)
Vacuum to 250 psig (1.7 MPa)Vacuum to 125 psig (0.9 MPa)
NPT 1/8 inch
Top
1.5 lbs (0.68 kg)
∗
3)
Option (Part number: AP PL 210)
∗
4)
NPT 1/8 inch
Top
1.5 lbs (0.68 kg)
∗
3)
N/A
1000 psig (6.9 MPa)
8000 psig (55.2 MPa)
14 to 160°F (–10 to 71°C) (No freezing)
∗
1)
0.29
2 x 10
-11
Pa·m
3
/sec
2 x 10
-10
Pa·m
3
/sec
∗
2)
4 x 10
-9
Pa·m
3
/sec
∗
2)
Ra max 15 µin. (0.4 µm) Option: 10 µin. (0.25 µm), 7 µin. (0.18 µm), 5 µin. (0.13 µm)
Face seal, Tube weld
70 to 110 psig (0.48 to 0.76 MPa)
10-32 UNF thread
Side
Bottom mount
0.06 in
3
(1.07 cm
3
)
1.8 lbs (0.82 kg)
∗
3)
Specifications
(Inlet) (Outlet)
Optional portings and porting
configurations available.
Please refer to P.125.
∗1) High temperature available. Please contact SMC.
∗2) Tested with Helium gas inlet pressure 125 psig (0.9 MPa).
∗3) Mass, including individual boxed weight, may vary depending on connections or options.
∗4) Refer to the specification for options. (P.124)
∗3) Indication of closed status.
∗4) Indication of opened status.
∗1) Only applies to S material with
TW4 connections.
∗2) Not available with H material.
Model
540
550
580
Status
Normally closed (N.C.)
Normally open (N.O.)
Maximum operating
pressure
Code
125 psig (0.9 MPa)
250 psig (1.7 MPa)
Air operated type
(For low pressure)
Diaphragm Valve for Ultra High Purity
Inboard leakage
Outboard leakage
100
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