Chillers - SEMI Standard Chiller


HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant

HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant

HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.

HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant

HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with tap water or deionized water for the coolant.

HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  This model includes inverter control of the pump rotations for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.    This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant

HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  This model includes inverter control of the pump rotations for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.    This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.